Void formation during film growth: A molecular dynamics simulation study
نویسندگان
چکیده
منابع مشابه
Void formation during film growth: A molecular dynamics simulation study
Two-dimensional, nonequilibrium molecular dynamics simulations have been applied to study the structure of thin films grown on single-crystal Lennard-Jones substrates. The principal microstructural features to develop within these films are single vacancies and small voids which tend to be slightly elongated and to be aligned in the growth direction. Both the void volume and the mean surface ro...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1996
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.360983